X射线掠入射法测定金刚石薄膜厚度的研究  

Study on Thickness Determination of Diamond Film by Grazing Incidence of X-ray Diffraction

作　　者：方建锋[1] 唐伟忠[2] 张晋远[1] 郑毅[1] 

机构地区：[1]钢铁研究总院粉末冶金研究室,北京100081 [2]北京科技大学材料科学与工程学院,北京100083

出　　处：《物理测试》2007年第4期8-11,共4页Physics Examination and Testing

摘　　要：本文研究了用近平行的入射X射线,以掠入射的方式,利用薄膜下基体某一晶面衍射强度随掠入射角的变化关系来测定薄膜厚的方法。导出了基体某一晶面的衍射强度的对数InIr与掠入射角函数f(r)之间的线性关系,发现该直线的斜率即为薄膜的线吸收系数与其厚度的乘积。对WC-Co硬质合金上的金刚石薄膜厚度进行了测定,并对该方法的重复性进行了验证。结果表明,InIr与f(r)之间的具有很好的线性相关性,而且该方法具有较好的精确性。In this paper, a method for determining the thickness of diamond films has been developed by using grazing incidence X-ray technique. It is based on the variation of diffraction intensities from a crystal plane of the substrate at different grazing angles. A linear relation between the logarithm of the differction intensities from the substrate InL and the grazing incidence angle function f（r） was deduced, and the slope of the line is just the product of linear absorption coefficient of the thin film and its thickness. The thickness of a diamond thin film on cemented carbide WC-Co has been tested, and the repeatability of this method was investigated. Results show that there is a good linear correlation between InL and f（r）, and that this method has high precision.

关 键 词：掠入射X射线衍射 金刚石薄膜 厚度测定 

分 类 号：O484.5[理学—固体物理]