准分子激光化学反应淀积硫化物薄膜  

Deposition of Sulphide Films by Excimer laser Photochemical Reaction

作　　者：席明霞[1,2] 武四新[1,2] 郑隽 吴正亮[1,2] 李缙 赵国珍[1,2] 曹基文 

机构地区：[1]中国科学院上海光机所 [2]机械工业部上海材料研究所

出　　处：《中国激光》1997年第8期760-764,共5页Chinese Journal of Lasers

摘　　要：提出了一种新的激光光化学三元反应体系，用于制备硫化铅薄膜。应用吸收光谱、扫描电镜和Ｘ射线光电子能谱等测试手段研究了膜的性质和组成，指出了该方法淀积硫化物薄膜的可行性。In this paper, we proposed a new laser photochemical ternary reactive system for preparing the PbS thin film. The composition and property of the deposited film were investigated by different techniques (absorption spectroscopy, scanning electron microscopy, X ray photoelectron spectroscopy, etc.). We have demonstrated the possibility of depositing sulphide films by this method.

关 键 词：化学气相淀积 淀积膜 薄膜 激光光化学 

分 类 号：O644.18[理学—物理化学]