跟踪式偏振光三角法测头  

Polarization-light triangulation tracking probe

作　　者：赵敏[1] 邱宗明[1] 郭彦珍[1] 刘宏昭[1] 

机构地区：[1]西安理工大学机械与精密仪器工程学院,陕西西安710048

出　　处：《光电工程》2007年第12期49-53,共5页Opto-Electronic Engineering

摘　　要：针对三角法测量的不足,设计了一种跟踪式偏振光三角法测头。对三角测量法的理论分析表明减小测量范围能提高测量精度。测头结合表面跟踪方法与三角测量法,跟踪使测量范围不受限制;仅在小范围内进行三角法测量,测量精度大大提高。对金属表面的反射特性进行了分析和推导,得出镜面反射与漫反射具有不同的偏振特性。通过偏振滤光减少了镜面反射光对测量的影响,从而降低了对被测表面材质的要求。本文给出了测头结构和工作原理。试验表明,测头能测量镜面反射较强的金属表面,测头可自动跟踪表面,并可结合测距仪实现表面形状的高精度测量。A polarization-light triangulation tracking probe is designed to overcome the shortcoming of triangulation measurement. The theoretical analyses of triangulation method prove that measurement precision can be improved by reducing measurement range. The proposed method combines surface tracing method with triangulation method Measurement range is limitless by tracking. Measurement precision is improved greatly by triangulation measurement only in small range. Analyzing and deriving the reflection property of metal surface, different polarization properties between mirror reflection and diffuse reflection are obtained. Polarization-light filtering is used to reduce the bad effect of mirror reflection light on measurement, so as to lower the material characteristic demand of measured surface. The structure and the working principle of the probe are described in this paper. It is proved that the probe can measure metal surface of high mirror reflection. In the experiment, the probe can track surface automatically and take high precision measurement of surface shape with telemeter

关 键 词：跟踪 三角法 偏振光 表面面形 

分 类 号：TN247[电子电信—物理电子学]