光针扫描法检测光滑表面粗糙度  

Measurement of the Smooth Surface Roughness Using Optical Probe Scanning Method

作　　者：王丽会[1] 王政平[1] 张锡芳[1] 

机构地区：[1]哈尔滨工程大学理学院,哈尔滨150001

出　　处：《光学与光电技术》2007年第6期38-41,55,共5页Optics & Optoelectronic Technology

摘　　要：提出了一种用于光滑表面粗糙度测量的方法,利用两个标准参考面和两个偏振片实现对表面粗糙度的测量,通过两1/4波片克服光路可逆性的缺陷,给出了测量系统光路图,导出了该方法工作原理的数学表达式,并对该方法产生的测量不确定度进行了理论计算与计算机仿真,最后通过对一标准粗糙度样块进行测量,证明了该方案的可行性。结果表明实测值与样块厂家提供的标称值相符,并可实现0.2nm的测量精度。A novel method is proposed for the measurement of smooth surface roughness. Two standard reference surfaces and two polaroids are employed to realize the measurement of the surface roughness. The reversibility of the optical path is overcome by using two quarter-wave plates. The optica[ path diagram of measurement system is shown. The mathematical expression of the working principle is derived. The uncertainty of the method is theoretically calculated and digitally simulated. Finally, the feasibility of this method is verified by measuring a standard roughness sample. The measurement result is in accordance with the standard value of the sample roughness provided by the manufacturer and a 0. 2 nm measurement precision is realized.

关 键 词：光学测量 表面粗糙度 光针扫描 琼斯矩阵 

分 类 号：TN247[电子电信—物理电子学]