光学材料光学均匀性检测方法分析  

Optical Homogeneity Measure Method Analysis of Optical Material

作　　者：任寰[1] 袁静[1] 许华[1] 陈波[1] 汤晓青[1] 马可[1] 马玉荣[1] 杨一[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,绵阳621900

出　　处：《光学与光电技术》2007年第6期48-51,共4页Optics & Optoelectronic Technology

摘　　要：光学均匀性是光学材料的重要指标,直接影响到透射光学系统的波面质量,改变系统的波相差。惯性约束聚变(Inertial Confine Fusion,ICF)激光驱动器的研制要求对材料的光学均匀性进行高精度的检测,同时兼顾洁净度要求。实验中利用斐索干涉仪实现了大口径光学材料光学均匀性的检测,并与国外检测数据进行了对比,对检测过程中的影响因素主要包括样品的厚度测量偏差及折射系数偏差进行了分析。结果表明,样品的厚度测量偏差及折射系数偏差对结果的影响较小,可以忽略。同时用两种干涉仪专用软件对大量样品测量数据进行处理,对比了不同干涉仪光学均匀性的计算结果,表明这两种情况下对光学均匀性的处理结果相符,解决了大口径光学坯件光学均匀性的检测问题。Homogeneity is an important parameter of optical material. It can directly influence the wavefront quality of transmission optical system and change wavefront aberration. The development of ICF demands high precision measurement of optical homogeneity and clean surface. The optical homogeneity of large optical material is measured by Fizeau interferometer. The experimental data are compared with the data overseas. The influence factors are including measuring error of the thickness and refractive index. The experimental results show that the deviations of the thickness and the refractive index can be ignored. Lots of data are analyzed by two different interferometers. The results prove that different softwares make the same results. The optical homogeneity measurement of large optical material is solved.

关 键 词：光学均匀性 波前 光学材料 折射系数 

分 类 号：TN247[电子电信—物理电子学]