Tribological properties of diamond-like carbon films deposited bv pulsed laser arc deposition  

作　　者：张振宇 路新春 雒建斌 

机构地区：[1]State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China [2]Key Laboratory for Precision and Non-Traditional Machining Technology of the Ministry of Education Dalian University of Technology, Dalian 116024, China

出　　处：《Chinese Physics B》2007年第12期3790-3797,共8页中国物理B（英文版）

基　　金：Project supported by the National Key Basic Research Program of China （Grant No 2003CB716201）, the Major Research Plan of the National Natural Science Foundation of China （Grant No 50390060）, the National Natural Science Foundation of China （Grant No 50575121）, the National Science Foundation for Post-doctoral Scientists of China （Grant No 20060390064）, the Electro- Mechanic Technology Foundation of NSK Ltd. of Japan, the Scientific Startup Research Foundation for the New Staff of Dallan University of Technology, and the Open Foundation of Key Laboratory for Precision and Non-Traditional Machining Technology of the Ministry of Education, Dalian University of Technology （Grant No JMTZ200703）.

摘　　要：A novel method, pulsed laser arc deposition combining the advantages of pulsed laser deposition and cathode vacuum arc techniques, was used to deposit the diamond-like carbon （DLC） nanofilms with different thicknesses. Spectroscopic ellipsometer, Auger electron spectroscopy, x-ray photoelectron spectroscopy, Raman spectroscopy, atomic force microscopy, scanning electron microscopy and multi-functional friction and wear tester were employed to investigate the physical and tribological properties of the deposited films. The results show that the deposited films are amorphous and the sp2, sp3 and C-O bonds at the top surface of the films are identified. The Raman peak intensity and surface roughness increase with increasing film thickness. Friction coefficients are about 0.1, 0.15, 0.18, when the film thicknesses are in the range of 17-21 nm, 30-57 nm, 67-123 nm, respectively. This is attributed to the united effects of substrate and surface roughness. The wear mechanism of DLC films is mainly abrasive wear when film thickness is in the range of 17-41 nm, while it transforms to abrasive and adhesive wear, when the film thickness lies between 72 and 123 nm.A novel method, pulsed laser arc deposition combining the advantages of pulsed laser deposition and cathode vacuum arc techniques, was used to deposit the diamond-like carbon （DLC） nanofilms with different thicknesses. Spectroscopic ellipsometer, Auger electron spectroscopy, x-ray photoelectron spectroscopy, Raman spectroscopy, atomic force microscopy, scanning electron microscopy and multi-functional friction and wear tester were employed to investigate the physical and tribological properties of the deposited films. The results show that the deposited films are amorphous and the sp2, sp3 and C-O bonds at the top surface of the films are identified. The Raman peak intensity and surface roughness increase with increasing film thickness. Friction coefficients are about 0.1, 0.15, 0.18, when the film thicknesses are in the range of 17-21 nm, 30-57 nm, 67-123 nm, respectively. This is attributed to the united effects of substrate and surface roughness. The wear mechanism of DLC films is mainly abrasive wear when film thickness is in the range of 17-41 nm, while it transforms to abrasive and adhesive wear, when the film thickness lies between 72 and 123 nm.

关 键 词：pulsed laser arc deposition diamond-like carbon tribological property physical property 

分 类 号：O43[机械工程—光学工程]