激光和等离子体混合法氮化钛表面  

Nitridation of titanium by laser and plasma mixing technology

作　　者：于撼江[1] 孙凤久[1] 张军[1] 

机构地区：[1]东北大学理学院,辽宁沈阳110004

出　　处：《功能材料》2007年第12期1987-1989,共3页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(59974010)

摘　　要：采用激光和氮等离子体混合方法在大气气氛下对钛样品表面进行处理,获得了钛氮化合物表层。利用X射线衍射仪(XRD)对氮化处理后的样品测试,得到了样品的相结构。分别使用该方法与普通激光氮化方法,在相同条件下对样品表面进行氮化处理,结果表明通过混合方法提高了氮化物含量,并有效地抑制了氧化发生。讨论了氮等离子体流量对混合法氮化效果的影响。随着氮等离子体流量的增加,氮化物含量增加;但是当氮等离子体流量>0.8m3/h后,氮化所需活化氮达到饱和,氮化物含量不再增加。Titanium nitride was obtained by the mixing technology with laser and plasma beams nitriding coaxially on the surface of titanium in atmosphere. X-ray diffraction （XRD） measurements reveal formation of titanium nitride in the astreated sample. The more titanium nitride can be obtained by the mixing method than that by the common laser nitriding method. And the oxidation was restrained by the mixing method, too. The relationship of nitriding results with different nitrogen plasma fluxes was discussed. The quantities of titanium nitride increase with the increase of nitrogen plasma fluxes. However, when nitrogen plasma flux is more than 0.8m^3/h, the quantities of titanium nitride do not increase anymore.

关 键 词：钛氮化合物 激光等离子体混合法 表面改性 

分 类 号：TG156.99[金属学及工艺—热处理]