低能离子束辅助大面积制备纳米点阵列  

Fabrication of large area nanodot arrays by assistance of low energy ion bombardment

作　　者：俞国军[1] 王森[1] 巩金龙[1] 曹建清[1] 朱德彰[1] 

机构地区：[1]单位中国科学院上海应用物理研究所,上海201800

出　　处：《核技术》2007年第12期995-1000,共6页Nuclear Techniques

基　　金：国家自然科学基金(10375085);上海市纳米专项基金(0352nm050)资助

摘　　要：本工作研究了离子束辅助下在氧化铝模板中大面积制备纳米点阵列的方法。利用此方法,可成功地制备出密度为1.2×10-0cm-2、直径高度统一、排列有序的镍和金纳米点阵列。纳米点直径和密度可由氧化铝模板的孔胞参数控制。这种制备方法亦可适用于其他材料,并为研究纳米点的尺度相关特性提供了契机。An ion beam assisted method for large-area fabrication of nanodot arrays in anodic alumina oxide （AAO） templates was investigated. By this method, ordered arrays of Ni and Au nanodots with highly uniform diameters and density of 1.2×10^10/cm^2 were fabricated. The diameter and packing density of nanodots can be controlled by the cell parameters of AAO template. The fabrication method presented here can be extended to many other materials and allows further investigation of the size related characteristics in nanodot structures.

关 键 词：离子束 纳米点阵列 氧化铝模板 

分 类 号：O484[理学—固体物理]