扫描电声显微镜中干扰信号及假信号的预防  

Prevention of disturbed and False Signals in Scanning Electron Acoustic Microscope

作　　者：张冰阳[1] 江福明[1] 杨阳[1] 惠森兴[1] 姚烈[1] 殷庆瑞[1] 

机构地区：[1]中国科学院上海硅酸盐研究所无机功能材料开放实验室,上海200050

出　　处：《无机材料学报》1997年第4期637-640,共4页Journal of Inorganic Materials

基　　金："63"高技术!(715-10-02-03);国家自然科学基金!59372115

摘　　要：本文对扫描电声显微镜电声成像中出现的干扰信号以及假信号的产生进行了讨论．指出扫描电声显微镜设备周围存在的高强度电场、磁场、高频设备和仪器本身的接地是造成干扰信号出现的主要原因，同时给出了一种能有效防止以上干扰的样品一探测器组件结构．而在电声像中假信号产生的原因则主要是由于样品和探测器接地不当所引起．在进行电声成像观察和记录时最好关掉电镜的对比度旋钮．The effects of disturbed and false signals on Scanning Electron Acoustic Microscope (SEAM)are presented in this paper. Various reasons such as high electric fields, magnetic fields and high frequency instruments causing the disturbed signals on SEAM are discussed and a sample of detection assembly is give out, simultaneously. Emergence of false signals in SEAM is also analyzed on the bases of the upper surface of the sample earthed and the sample-transducer interface unearthed, the upper surface of the transducer earthed and the surface of the sample unearthed, and with both the upper surface of the sample and the transducer earthed. It would be best that the contrast switch is turned off when electron acoustic images are observed and imaged.

关 键 词：干扰信号 假信号 扫描电声显微镜 电子显微镜 

分 类 号：TN16[电子电信—物理电子学]