罗丹明B作为试踪剂在测试光生酸剂产酸中的应用  

The Application of Rhodamine B as an Acid Sensor in the Test of Acid-Generation of Photoacid Generators

作　　者：李俊平[1] 张伟民[1] 王美丽[1] 蒲嘉陵[1] 

机构地区：[1]印刷包装材料与技术北京市重点实验室北京印刷学院,北京102600

出　　处：《北京印刷学院学报》2007年第6期81-83,共3页Journal of Beijing Institute of Graphic Communication

基　　金：北京市教委资助项目(KM200610015004)

摘　　要：采用一种在树脂膜中测试光生酸剂产酸量的方法,测试了膜中光生酸剂的产酸率。以罗丹明B为试踪剂,在酸性条件下罗丹明B的紫外吸收随酸浓度而变化,通过其紫外吸光度的改变来反映酸度的变化。用紫外分光光度计分别测量盐酸、三氟甲磺酸在不同浓度时罗丹明B特征吸收的变化,选取酸浓度与罗丹明的特征吸收的变化量呈线性关系的线段部分作为标准工作曲线。根据标准工作曲线及推导出的公式,通过计算就可以得出光生酸剂曝光产生的酸量。The paper reported a method to measure photoinduced acid generation in polymer films, which were widely used in microlithography. The method employed Rhodamine B （RB） as an acid sensor, due to its character that uv-vis absorbency would change in acidic condition. The property of Rhodamine B was examined in hydrochloric and Trifluoromethyl sulfonic acid, and the standard working curves in thin polymer film were set up. In this case, the difference in absorbency could reflect the different amounts of acid generated. According to these standard working curves and formula, the efficiency of PAG generated acid could be calculated.

关 键 词：光生酸剂 罗丹明B 产酸 

分 类 号：TQ317.2[化学工程—高聚物工业]