激光分子束外延法制备Fe纳米阵列结构  

Fe Nano-arrays Fabricated by Laser Molecular Beam Epitaxy with AAO as Templates

作　　者：骆智训[1] 万兰芳[2] 方炎[1] 

机构地区：[1]首都师范大学北京市纳米光电子学重点实验室 [2]三峡大学理学院,湖北宜昌443002

出　　处：《三峡大学学报（自然科学版）》2007年第6期574-578,共5页Journal of China Three Gorges University：Natural Sciences

基　　金：国家自然科学基金(20275024);北京市自然科学基金(2982010)

摘　　要：采用阳极氧化铝箔的方法制备了孔径分布均匀的阳极氧化铝(AAO)模板,然后通过激光分子束外延(LMBE)的方法在这些孔洞里生长有序铁纳米阵列,根据控制生长的条件,生长出纳米线、纳米管,以及高度有序的量子点阵列,甚至得到纳米复制的新的复形模板.实验发现,虽然LMBE系统本身的高度可控性是这些不同类型的有序纳米阵列的前提,但不同材料在模板纳米孔洞里的不同生长趋向以及生长模式是探索可控生长的决定因素.这些可控参数的深入探讨为纳米阵列材料在微器件和纳米复制领域将有更直接的实际意义.Anodic aluminum oxide （AAO） template was prepared for nano-copy with the controllable aperture between 5nm and 200 nm. Employing the method of laser molecular beam epitaxy （LMBE）, different Fe nano-arrays were grown in the pores of AAO template. Taking advantage of the controllability of LMBE and the high-ordered AAO templates, quantum dots, nano-wire, nano-tubes and complex templates with iron as frame were prepared. It is discovered from the experiments that besides the controllability of LMBE system itself, the epitaxy orientation and growth model are the key to probe into the controllable epitaxial growth of Fe Nano-arrays which benefits the direct applications in micro devices and real nano-copy.

关 键 词：LMBE AAO模板 铁 纳米阵列 复形模板 

分 类 号：O482[理学—固体物理]