宽范围原子力显微镜在超精加工中应用研究  

Research on Application of Wide Range Nuclear Force Microscope in ultra- precision machining

作　　者：张鸿海[1] 张华书[1] 师汉民[1] 陈日曜 

机构地区：[1]华中理工大学

出　　处：《制造技术与机床》1997年第6期27-30,共4页Manufacturing Technology & Machine Tool

基　　金：国家自然科学基金!69474022;国家教委博土点基金!9348718

摘　　要：介绍了用于分析起精加工的原子力显微镜。其垂直方向和水平方向的分辨率可达纳米级，测量范围可达140×140μm。采用探头扫描方法和双扫描工作模式，扩大了该测量方法的应用范围。给出了金刚石刀具钝圆半径与精密玻璃光栅和超精密抛光陶瓷的轮廓形貌的测量结果。A wide range nuclear force microscope is designed for analysis of ultra-precision machining. The resolution of the microscope is reached to urn at vertical and horizontal directions and the obtainable measuring range is 140μm×140μm. The engineering applications of such measuring method is expanded by using probe scanning and double scanning modes. The paper shows the measuring results of blunt radius of diamond tool,precision glass grating and profile and topography of ultra-precision polished ceramics.

关 键 词：超精密加工 金刚石刀具 原子力显微镜 

分 类 号：TG669[金属学及工艺—金属切削加工及机床]