扫描电子显微镜样品常规处理镀膜技术的改进  

Study on Improvement of Deposition Technology in Scanning Electron Microscope Sample Regular Processing

作　　者：陈伟之[1] 

机构地区：[1]沈阳农业大学分析测试中心,沈阳110161

出　　处：《沈阳农业大学学报》2007年第6期864-867,共4页Journal of Shenyang Agricultural University

摘　　要：扫描电子显微镜是观察研究试材表面微观、超微观结构的大型精密仪器。在观察研究试材前,要对试材表面进行镀金膜处理,此处理消耗材料成本十分昂贵,阻碍大数量样品的科学研究。几年来,沈阳农业大学分析测试中心根据生物、农业研究中微观试材的特点,用自主设计的铂合金靶和铜合金靶组合使用,替代国外同类专用产品,成本降低80%,对大数量样品的科学研究、试材处理的结果优于国外同类专用产品处理结果,为科学研究工作创造了有利条件。The scanning electron microscope （SEM） is a type of electron microscope capable of producing high-resolution images of a sample surface. In order to view non-conductive samples, the sample must be covered with a thin layer of a conductive material, however, the processing cost is extremely expensive resulting in hinderer on scientific research of the great quantity sample. For several years, by study the microscopic character of biological and agricultural materials, Analysis-testing Center of Shenyang Agricultural University used the combination of Pt/Au and Cu/Au to substite overseas similar special-purpose product. As a result, the processing cost decrease to 80% of original cost, and the processing result is better. The improved technology creates advantage for the research.

关 键 词：扫描电镜显微镜 铂合金靶 铜合金靶 镀金膜处理 处理成本 

分 类 号：G642.423[文化科学—高等教育学] Q336[文化科学—教育学]