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机构地区:[1]东营职业学院,山东东营257091 [2]中国石油大学物理科学与技术学院,山东东营257061
出 处:《青岛大学学报(工程技术版)》2007年第4期39-44,共6页Journal of Qingdao University(Engineering & Technology Edition)
摘 要:本实验是研究退火温度对MgB2超导薄膜的影响。在多晶Al2O3衬底上,以B2H6作为硼源,化学气相沉积先驱硼薄膜,采用Mg扩散方法,在不同退火温度条件下制备了MgB2超导薄膜;还采用了测量电阻-温度曲线、X射线衍射分析和扫描电子显微镜形貌观测方法。结果表明,退火温度对MgB2薄膜的超导特性、晶体结构和相纯、表面形貌有影响。退火温度高,生成的MgB2晶粒较大,晶形好,正常态电阻也增大,杂相越少。The purpose of this experiment is a research to annealing temperatures to influence the MgB2 superconductive thin film. The samples of superconducting MgB2thin films are prepared on Al2O3 polycrystalline substrates under various annealing temperatures by a two-step ex-situ magnesium-diffusion method with the precursor boron thin films grown by CVD from B2H6. Adopted to the methods of measuring resistance-temperature CUrvet X-ray diffraction analysis, scanning electron microscope observation. The result is to has influence on the critical temperature, crystal structure, phase purity and surface morphology of MgB2 thin films. The conclusion is the higher of annealing temperatures, the more and greatly of crystal grain of MgB2thin films; the crystal shape is more good; the higher of annealing temperature, the larger of the normal-state resistance; miscellaneous mutually more little.
关 键 词:MGB2超导薄膜 退火温度 转变温度 晶体结构 表面形貌 相纯
分 类 号:TB383.2[一般工业技术—材料科学与工程]
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