纳米集成光路中的光源、光波导和光增强  

The light source, optical waveguide and light enhancement of nano-integrated optical circuit

作　　者：刘丹[1] 马仁敏[1] 王菲菲[2] 张增星[2] 张振生[1] 张学进[1] 王笑[1] 白永强[1] 朱星[1] 戴伦[1] 章蓓[1] 

机构地区：[1]北京大学物理学院,人工微结构与介观物理国家重点实验室,北京100871 [2]中国科学院物理研究所,北京100080

出　　处：《物理学报》2008年第1期371-381,共11页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:10574002);国家重点基础研究计划(批准号:2007CB936800)资助的课题~~

摘　　要：使用近场光学显微术(scanning near-field optical microscopy,SNOM)研究了ZnO亚微米线端面出射性质,不同空间形貌Ⅱ-Ⅵ族半导体荧光器件光波导特性,二维光子晶体、准晶光子晶体对LED的出射增强作用以及表面等离激元(surface plasmon polariton,SPP)与半导体纳米荧光器件的相互作用,对纳米集成光路中的光源、光波导、光增强三个重要问题做了实验和理论上的分析.研究发现半导体微纳米线端面出射光束的质量与样品的直径有密切关系.通过合理地设计其直径和表面形貌,可以将其用于纳米集成光路中的光源和光波导.具有多种空间形貌的半导体原型荧光器件,如四脚锥结构、梳状结构、多分支结构都具有很好的光波导特性,能够实现分光、集光、耦合、滤波功能.二维光子晶体对GaN基LED的出光增强效果明显,最高可达5.2倍.近30%的荧光被局域在光子晶体表面没有传播出去.这一结论有利于进一步改善LED出光性能.将半导体光波导与SPP结合,在满足SPP共振激发条件时,可以增强二者界面处电磁场强度.光子晶体和SPP都可以实现低维、纳米尺度下的局域光放大,为纳米集成光路中的光增强提供了可能.Scanning near-field microscopy （SNOM） was used to investigate the low-dimensional semiconductor fluorescence divices, which can work as micro-nano-light source, nano-optical waveguide and light enhancement component in nano-integrated optical circuit. It was found that the quality of semiconductor wire end emission was mainly determined by the sample radius. By designing the wire radius and topography reasonably, it can be used as the light source and optical waveguide in nano-integrated optical circuit. ZnO tetrapod, comb, and CdS multi-branch nano-ribbon also presented quite good adequacy for optical waveguide application, which can function well in light division, congregation, coupling and filtering. 2-D photonic crystal can enhance the light intensity of GaN based LED by as large as 5.2 times. About 30% fluorescence is confined to the surface of photonic crystal. This conclusion is helpful for the optimization of LED light emission. When the resonance excitation condition is fulfilled, Surface plasmm polaritons （SPP） will be excited at the interface between the semiconductor and the silver thin film, which will bring about strong enhancement of electromagnetic field at the interface. Photonic crystal and SPP can realize light enhancement under low-dimensional and nano-scale conditions. The experimental results show that both of them have the potential application as enhancement components in nano-integrated optical circuit.

关 键 词：纳米集成光路 扫描近场光学显微术 光波导 光增强 

分 类 号：TN491[电子电信—微电子学与固体电子学]