直流磁控溅射Si和玻璃衬底Fe／Co多层膜的磁性能比较  

Comparison of magnetic properties of Fe/Co multilayers prepared by DC magnetron sputtering on glass and Si substrates

作　　者：夏爱林[1] 韩宝善[2] 

机构地区：[1]安徽工业大学材料科学与工程学院,马鞍山243002 [2]中国科学院物理研究所磁学国家重点实验室,北京100080

出　　处：《物理学报》2008年第1期545-549,共5页Acta Physica Sinica

基　　金：安徽省教育厅自然科学研究项目(批准号:KJ2007B217)资助的课题~~

摘　　要：对直流磁控溅射Si和玻璃衬底[Cot/Fe3t]5(t=2,3,4,5nm)多层膜的磁性能进行了比较.对于t相同但衬底不同的样品,实验发现饱和磁化强度相差很小,但是矫顽力却相差很大.对矫顽力差异的理论分析表明,多层膜的粗糙度和畴壁类型是引起这种差异的主要原因.We presented a comparison of magnetic properties of [ Cot/Fe3t ]5 （t = 2, 3, 4, 5 nm） multilayers prepared by DC magnetron sputtering on glass and Si substrates. For the muhilayers with the same t but prepared on different substrates, it was found that the saturated magnetization differed little, but the coercivity differed greatly. Moreover, the difference in coercivity mechanism was analyzed theoretically to explain this difference.

关 键 词：Fe/Co多层膜 磁性能 矫顽力 

分 类 号：O484.1[理学—固体物理]