复合双频光栅轮廓术研究  

Study of profilometry based on tow-frequency grating

作　　者：乔闹生[1] 赵华君[2] 蔡新华[1] 彭建英[1] 

机构地区：[1]湖南文理学院物理与电子科学系,湖南常德415000 [2]重庆文理学院物理与信息工程系,重庆402168

出　　处：《光电子．激光》2008年第1期74-77,共4页Journal of Optoelectronics·Laser

基　　金：湖南省教育厅科研资助项目(06C608);湖南省“十一五”重点建设学科光学基金资助项目;湖南文理学院科研重点资助项目(JJZD0702)

摘　　要：对于存在突变的不连续物体的测量,使用低频光栅时物体面形能够恢复,但测量精度不高;使用高频光栅时不连续部分的轮廓细节能够清晰的恢复,但存在相位包裹现象而出现截断相位。据此,提出将2种光栅的优点融和在一起的方法:首先设计适合的低频光栅在物体的突变部分产生一根条纹,使低频光栅产生的相位不需进行相位展开;然后由2种光栅的频率比值及高频的截断相位来确定高频光栅所产生的条纹的整数级数n2(x,y);最后求出高频的展开相位,从而高精度地恢复不连续物体的高度信息。计算机仿真结果表明了理论分析的正确性。For the measurement of discontinuous object that contains mutations,the shape of object can be regained with the low frequency gratlng,but the measuring precision is not high,it is difficult to regain the details of outline for the part of discontinuous object;While the result is superior when the high frequency grating is used, but it is difficult to obtain the unwrapping-phase because of the existence of wrapped-phase, so the shape of object can not be regained perfectly. The method that combines the advantages of two gratings is proposed：One stripe is produced in the mutation part of object with low frequency grating whose phase does not need to be unfolded;The integral n2（x,y） of stripe series is produced by high frequency grating based on the ratio of two frequency and the wrapped-phase of high frequency; Then the unwrapping-phase of the high frequency is obtained,so the height of discontinuous object is regained precisely;At last,the result of computer simulation and experiment verifies the correctness of the method.

关 键 词：双频光栅 傅里叶变换轮廓术 相位展开 测量精度 

分 类 号：TN247[电子电信—物理电子学]