自动组合装置赋时有色Petri网模型的建立分析  

Modeling,Analysis and Simulation of Cluster Tools for Semiconductor Manufacture Using Timed Color Petri Nets

作　　者：宫小凡[1] 吴智铭[1] 

机构地区：[1]上海交通大学,上海200240

出　　处：《计算机仿真》2007年第12期252-256,共5页Computer Simulation

基　　金：国家自然科学基金(65074049)

摘　　要：半导体制造中的自动组合装置是半导体制造的关键设备和瓶颈设备。对其性能进行量化的直观的分析对于半导体制造的效率和成本预测具有重要意义。文章阐述了如何利用Aarhus大学开发的CPN Tools对单臂双处理仓的自动组合装置建立赋时有色的佩特里网模型。文中按照不同建模思想建立起抽象型和具象型两个结构不同的模型,通过比对进行验证,最后利用CPN Tools自带的仿真功能进行仿真得出模拟运行的结果。文中的研究方法和结论对于复杂的自动组合装置的有色佩特里网的分析具有一定的参考价值。Cluster tools are the critical equipment for semiconductor manufacture,and usually,the bottleneck equipment.Intuitionistic performance quantitive analysis is significant to the production efficiency analysis and cost prediction.This article proposed a detailed process on how to build timed color Petri nets model of single-robot dual-chamber cluster tools using CPN Tools developed by University of Aarhus.Two models of one cluster tools were built using abstract and non-abstract logic structures.Finally two models based on different logic structures were compared to get a simulation result by running the model in CPN Tools.The methodology and result in this article can be a guide for the modeling and analysis of complicated cluster tools using timed color Petri nets.

关 键 词：自动组合装置 佩特里网 建模 仿真 

分 类 号：TP206.3[自动化与计算机技术—检测技术与自动化装置]