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作 者:张云[1] 左玉华[1] 郭剑川[1] 丁武昌[1] 成步文[1] 余金中[1] 王启明[1]
机构地区:[1]中国科学院半导体研究所集成光电子国家重点实验室,北京100083
出 处:《Journal of Semiconductors》2008年第1期55-62,共8页半导体学报(英文版)
基 金:国家高技术研究发展计划资助项目(批准号:2006CB302802)~~
摘 要:We propose a fiber-to-waveguide coupler for side-illuminated p-i-n photodiodes to obtain high responsivity and low polarization dependence that is grown on InP substrate and is suitable for surface hybrid integration in low cost modules. The fiber-to-waveguide coupler is based on a diluted waveguide,which is composed of ten periods of undoped 120nm InP/80nm InGaAsP (1.05μm bandgap) multiple layers. Using the semi-vectorial three dimensional beam propagation method (BPM) with the central difference scheme,the coupling efficiency of fiber-to-waveguide under different conditions is simulated and studied,and the optimized conditions for fiber-to-waveguide coupling are obtained. For TE-like and TM-like modes,the calculated maximum coupling efficiency is higher than 94% and 92% ,respectively. The calculated polarization dependence is less than 0. ldB,showing good polarization independence.研究了一种用于边入射型探测器的InP基高效光纤-波导耦合器.它由10个周期的未掺杂120nmInP/80nmInGaAsP(1.05μm带隙)多层膜组成的稀释波导构成.采用半矢量三维束传播(BPM)方法以及中心差分格式,模拟了不同条件下的光纤-波导耦合效率,从而得到了最优耦合条件.对于TE偏振和TM偏振模,计算所得到的最高耦合效率分别为94%和92%.同时,计算表明,此类基于稀释波导的光纤-波导耦合器具有高偏振不敏感性,偏振敏感度低于0.1dB.
关 键 词:diluted waveguide BPM fiber-to-waveguide waveguide photodiode
分 类 号:TN622[电子电信—电路与系统]
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