干冰微粒喷射法清洗ITO玻璃及其对有机电致发光器件性能的影响  

Influence of Carbon Dioxide Snow Jet Spray Cleaning of ITO Anodes on Performance of OLED

作　　者：齐童[1] 李军建[1] 李璐[1] 王军[1] 

机构地区：[1]电子科技大学光电信息学院,四川成都610054

出　　处：《液晶与显示》2007年第6期677-681,共5页Chinese Journal of Liquid Crystals and Displays

基　　金：国家自然科学基金资助项目(No.60677011)

摘　　要：采用干冰微粒喷射法对ITO玻璃表面进行了清洁处理,并与浸泡式低频超声波湿法清洗的ITO玻璃进行了对比测量,结果表明:干冰微粒喷射法处理后,ITO薄膜表面的接触角减小,表面污染物颗粒数量下降,ITO薄膜表面上碳的含量较之未处理时降低了48.5%,锡、铟的含量分别增加了533.33%和267.57%,说明干冰微粒法对ITO薄膜表面的有机污染物和杂质颗粒的清洗效果超过了超声波湿法。此后,制备了干冰微粒法清洗ITO阳极的有机电致发光器件(OLED)器件,以及结构相同但ITO电极是用超声波湿法清洗的OLED器件,对这两种器件的参数进行了测量,其结果表明:干冰微粒喷射法清洗器件的启亮电压、亮度和电流效率与超声波湿法清洗的相比较均有所改善。Surface cleaning of indium-tin oxide（ITO）anodes was carried out with carbon dioxide snow jet spray cleaning and low frequency ultrasonic immersion wet cleaning.The results show that carbon dioxide snow jet spray decreases the contact angle and the particle of surface pollutants.The carbon content on the ITO film surface reduced 48.5 % compared with untreated one.The content of tin,indium increased by 533.33 % and 267.57 %.The experimental data show that carbon dioxide snow jet spray achieves better effect than ultrasonic wet cleaning in organic pollutants and particles.Furthermore,the influence of surface cleaning of ITO electrodes on characteristics of OLED is studied.The device treated by carbon dioxide snow jet spray has the effective improvement in turn-on voltage,electroluminescence luminance and efficiency.

关 键 词：OLED ITO 干冰微粒喷射法 清洗 

分 类 号：TN873.3[电子电信—信息与通信工程]