多晶TiO_2氧敏特性及其机制的研究  

A Study on Oxygen Sensing of Polycrystalline Rutile

作　　者：严六明[1] 严琪良 关庆彬[2] 王燕谋[2] 王廷籍[2] 

机构地区：[1]华东理工大学化学系 [2]中国建筑材料研究院

出　　处：《华东理工大学学报（自然科学版）》1997年第4期462-466,共5页Journal of East China University of Science and Technology

摘　　要：研究了多晶金红石ＴｉＯ２氧敏半导体材料的氧敏特性及其机制。结果表明，表征ＴｉＯ２导电机制的特性参数ｍ并非常数，它与杂质浓度、温度、氧分压等多种因素有关。本文认为，ＴｉＯ２的主要点缺陷由不同电离状态的氧空位所构成，该模型可以解释有关的实验结果。This paper reports experimental results on the oxygen sensing of poly crystalline rutile. Experimental results showed that the parameter m in oxygen partial pressure dependence of electical conductivity for the rutile is related to the temperature. A random point defect model was established in this paper for a general case. The model was used to explain our and other experimental results, and the model aslo predicts that the parameter m is related to the concentration of impurity, and the oxygen partial pressure.

关 键 词：金红石 电导率 半导体 二氧化钛 氧敏特性 

分 类 号：TN304.21[电子电信—物理电子学]