一种高精度多功能双用原子力显微镜技术及应用  

Technology and application of a new-style high-resolution capability multifunctional amphibious atomic force microscope

作　　者：彭光含[1] 杨学恒[2] 刘济春[2] 李旭[2] 辛洪政[2] 

机构地区：[1]湖南文理学院物电系 [2]重庆大学数理学院,重庆400030

出　　处：《仪器仪表学报》2008年第1期179-184,共6页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(59775069);湖南省教育厅科学基金(06C606);湖南省“十一五”重点建设专业-光学基金(06GXCD02);湖南文理学院基金(JJQD05051)资助项目

摘　　要：主要研究了一种基于高精度IPC-205B型扫描隧道显微镜(STM)的新型高精度多功能双用原子力显微镜(AFM)技术及其应用。阐述该原子力显微镜的工作原理、组成及应用,详细介绍了该AFM镜体的独特结构和新型微悬臂的制作及其检测方法。该AFM采用简单适用的新型微悬臂。并利用STM检测微悬臂的起伏,通过四维机械驱动和双压电陶瓷扫描,有效提高了扫描精度,扩大了扫描范围。该机型集AFM和STM功能为一体,其中STM可以单独使用。该机型检测精度可达:横向0.1 nm,纵向0.01 nm。并用该样机进行了样品表面形貌和隧道谱的实验研究。The technology and application of a new-style high resolution and multifunctional amphibious atomic force microscope （AFM）, which is based on IPC-205B high resolution scanning tunneling microscope （STM）, has been studied mainly. The operation principle, components and some applications of the AFM system are reported. The special structure of the lens body of the atomic force microscope system and the manufacture and detection method of the new-type cantilever are introduced in detail. The AFM adopts a new simple and useful cantilever. And the AFM model uses a STM to detect the shift of the cantilever, which is driven by four-dimensional motors and scanned by two PZT tubes to enlarge the scanning range and enhance the resolution effectively. The prototype is integrated with the functions of AFM and STM, and the STM can be applied separately.Its detection resolution is：transverse-0.1 nm, vertical -0.01 nm. Experiment studies on sample surface appearance and tunnel spectrum were carried out using this prototype.

关 键 词：原子力显微镜 镜体 微悬臂 隧道谱 

分 类 号：TH122[机械工程—机械设计及理论]