Ar^+激光器用于电阻微调的研究  

Utilization of Ar + laser for resistance trimming

作　　者：秦水介[1] 张正平[1] 

机构地区：[1]贵州大学物理系

出　　处：《激光技术》1997年第3期178-181,共4页Laser Technology

摘　　要：本文讨论并研究了Ａｒ＋激光器用于电阻微调的优越性。结果表明，在比常用的Ｎｄ∶ＹＡＧ激光功率小得多的情况下。The resistance trimming often use a CO 2 laser or Nd∶YAG laser as a light source.And the Ar + laser has shorter wavelength than Nd∶YAG and CO 2 laser.The reflection index of melt film is smaller for 514.5nm wavelength and it is easy to build a better optical system to provide precise resistance trimming.This paper described the trimming system and summarized much practical data.

关 键 词：电阻微调 氩离子激光器 激光加工 电阻器 

分 类 号：TN248[电子电信—物理电子学] TM540.6[电气工程—电器]