楔条形阳极收集器的参量设计与工艺优化  

Parameter Design and Technics Optimization of Wedge and Strip Anodes Collector

作　　者：缪震华[1] 赵宝升[1] 刘永安[1] 朱香平[1] 张兴华[1] 

机构地区：[1]中国科学院西安光学精密机械研究所瞬态光学与光子技术国家重点实验室

出　　处：《光子学报》2008年第1期11-16,共6页Acta Photonica Sinica

基　　金：中科院知识创新工程方向性项目资助

摘　　要：分析了楔条形阳极收集器各参量对探测器主要性能的影响,研究了圆形收集器的设计方法,制定并优化了相应的制作工艺.以此为基础,设计和制作了两块有效探测面积Φ48mm、周期1.2mm、绝缘沟道宽度30μm、电极厚度分别为1μm和2μm的圆形收集器.通过对比和分析这两块收集器的电阻和电极电容值以及相应的成像实验,验证了上述研究方法的正确性和'先光刻腐蚀后电镀增厚'工艺方案的可行性.The effect of many parameters for WSA collector on the primary performance indexes of detector were analysed, a design method of circular collector was studied. A corresponding implementary scheme on technics was proposed and optimized. On these basises, two circular collectors, one＇s electrode thickness is 1 μm and the other＇s is 2 μm, have been designed and factured. The detecting area of the two collectors are Φ48 mm, the periods are 1.2 ram, and the widths of insulating gap are 30μm. It is proved that all above proposed methods are correct and the implementary scheme on technics, electroplating after photo-lithography and chemical etching, is feasible by measuring, analysing, and imaging test.

关 键 词：阳极探测器 楔条形阳极收集器 参量设计 工艺优化 

分 类 号：TN201[电子电信—物理电子学] O463.1[机械工程—光学工程]