超声喷雾热解法制备TiO2薄膜  

Ultrasonic Spray Pyrolysis Deposition of TiO_2 Films

作　　者：何胜[1] 羊亿[1] 刘敏[1] 罗友良[1] 黄素梅[2] 

机构地区：[1]湖南师范大学物理与信息科学学院,湖南长沙410081 [2]华东师范大学纳光电集成与先进装备教育部工程研究中心,上海200062

出　　处：《电子器件》2008年第1期236-238,共3页Chinese Journal of Electron Devices

基　　金：This work was supported the Scientific Research Foundation for the Returned Overseas Chinese Scholars, State Education Ministry；by Foundations of Pujiang Talented Person Plans (No. 05PJ14037) and Nanotechnology (No. 0552nm042) of Shanghai Municipal Science ＆ Technology Committee；Shanghai-Applied Materials Research and Development fund (No. 0519).

摘　　要：成功地利用超声喷雾热解法在玻璃衬底上制备了TiO2薄膜。Ti(SO4)2作为钛源,甲醇作为溶剂。利用超声波的雾化作用将反应物形成细小的雾滴,并喷射到预热的玻璃衬底上分解而形成稳定的TiO2薄膜。为获得致密均匀的薄膜,优化了反应物浓度、温度、沉积时间等参数。利用X射线衍射与原子力显微镜表征了薄膜的晶体结构与表面形貌。X射线结果表明薄膜为多晶锐钛矿结构TiO2薄膜,并在(101)方向呈现出择优趋势。TiO2 films were successfully deposited on glass substrates using ultrasonic spray pyrolysis method. Ti （SO4）2 was used as reactant. Methanol was used as solvent. Tiny fog droplets including reactant produced by ultrasonic nebulizer unit were sprayed on pre-heated glass substrates. Then, pyrolysis of reactant will happen and thin films will be deposited on the glass. Several deposition condition such as concentration, temperature and deposition time were optimized for obtaining compact and uniform thin films. The crystal structure and surface morphology were characterized by XRD and AFM. The results show that the crystal structures of films are polycrystalline TiO2 anatase phase. The preferred orientation is （101）.

关 键 词：TIO2 Ti(SO4)2 超声喷雾法 锐钛矿 

分 类 号：TN304.055[电子电信—物理电子学]