基于13X型沸石分子筛的类神经毒气传感器  

Nerve agent stimulant gas sensor based on zeolite 13X

作　　者：杨涓涓[1] 任楠[2] 周嘉[1] 刘全[1] 黄宜平[1] 唐颐[2] 

机构地区：[1]复旦大学微电子学系专用集成电路及系统国家重点实验室,上海200433 [2]复旦大学化学系,上海200433

出　　处：《传感器与微系统》2008年第2期86-88,92,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(90607015)

摘　　要：研制了基于13X型分子筛阻抗型气体传感器,探测了神经类毒气沙林的相似物甲基磷酸二甲脂(DMMP)。通过交流电压对传感器进行激励,得到其交流阻抗谱的变化,从而实现对不同体积分数DMMP的检测。对0.2×10-6,0.4×10-6和1×10-6DMMP气体分别进行了检测,在1×10-6时(频率为0.01 Hz)电阻的相对变化可达13.2%;同时,分别采用13X型和Cu-β型分子筛作为敏感膜对1×10-6DMMP,100×10-6CO2和饱和蒸汽压下的乙醇气体进行了选择性比较实验。实验表明:基于13X型分子筛膜传感器对DMMP的探测有较好的灵敏度和选择性。An impedance gas sensor based on zeolite 13X for the detection of the nerve agent stimulant DMMP, which is regarded as the stimulant for satin, is developed. The sensitivity of the sensor for different volume fraction of DMMP gas is determined by exciting with an alternating voltage and determining the impedance response： The sensitivity for 0.2 × 10^-6, 0.4 ×10^ -6,1 × 10 ^-6 DMMP is investigated, respectively. The normalized resistance for 1 × 10^ -6 DMMP can reach 13.2 % at 0.01 Hz. The selectivity of zeolite film 13X and Cu-β is also compared in the detection of 1 × 10^ -6 DMMP, 100 × 10^ -6 CO2 and saturated ethanol, respectively. The experimental results show the good sensitivity and selectivity of the gas sensor based on zeolite 13X for the detection of DMMP gas.

关 键 词：分子筛 气体传感器 甲基磷酸二甲脂 选择性 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置]