TiN／TiN＋Si／TiN多层膜的高温微动磨损行为研究  

Behaviors of fretting Wear of TiN/TiN+Si/TiN coating

作　　者：何其荣[1] 刘捍卫[1] 夏云[2] 朱昊 

机构地区：[1]西南交通大学材料先进技术教育部重点实验室,成都610031 [2]四川成都工具研究所,成都610051

出　　处：《四川大学学报（自然科学版）》2008年第1期156-160,共5页Journal of Sichuan University(Natural Science Edition)

基　　金：教育部科学技术研究重点项目(106137);核燃料及材料国家级重点实验室基金(51481070104QT2201)

摘　　要：用直流等离子体增强化学气相沉积(PCVD)方法在T225NG钛合金基体上制备出厚度约为6μm的TiN/TiN+Si/TiN多层膜,重点研究了多层膜及钛合金基材在室温和高温条件下的微动磨损行为,采用激光共焦扫描显微镜测定磨损体积,用扫描电子显微镜观察磨痕微观形貌.结果表明:在室温(25℃)至400℃范围内,微动初期和稳定阶段多层膜的摩擦系数比钛合金基体低,磨损体积也比钛合金基材明显降低;多层膜磨损体积随着温度的升高而增大;多层膜可以显著降低钛合金基材的磨损;多层膜的损伤主要表现为剥层和磨粒磨损形式.TiN/TiN ＋ Si/TiN coating were deposited on T225NG titanium alloy substrate by plasma Chemical Vapor Deposition （PCVD）. Fretting wear tests of the coating and its substrate were carried out under room temperature and high temperature. The wear volume had been determined by means of Laser Confocal Scanning Microscopy （LCSM）. Dynamic analyses in combination with microscopic exam inations through Scanning Electric Microscope （SEM） were performed. As a result： From room temperature to 400 ℃, the friction coefficient of coating is lower than that of substrate at fretting initial stage and steady stage, Besides the wear volume is obvious lower than which of substrate; The wear volume of coating increased with the increase of temperature; Wear of material reduced greatly for the TiN/TiN ＋ Si/TiN coating; Delamination and abrasive wear is the major form of the damage mechanism of coating.

关 键 词：微动磨损 温度 TiN/TiN+Si/TiN多层膜 等离子体增强化学气相沉积(PCVD) 钛合金 

分 类 号：TB383[一般工业技术—材料科学与工程]