面向IC封装的两自由度精密气浮定位平台设计  

Design of 2D Precision Positioning Table with Air Bearings for IC Packaging

作　　者：张大卫[1] 张胜泉[1] 赵兴玉[1] 王福军[1] 

机构地区：[1]天津大学机械工程学院,天津300072

出　　处：《天津大学学报》2007年第11期1351-1356,共6页Journal of Tianjin University(Science and Technology)

基　　金：国家自然科学基金资助项目(50505032);天津市科技攻关计划资助项目(05YFGPGX06000)

摘　　要：为提高引线键合机定位机构的运动速度和定位精度,提出了一种基于气浮导轨支撑的两自由度高速精密定位平台.该平台采用了新型的气浮解耦机构,使音圈电机置于固定支座上,有效地减小了定位平台的运动惯量.阐述了该气浮平台的解耦原理,探讨了节流孔直径和轴径间隙对平台承载能力和静态刚度的影响规律,同时得到一组优化参数.在此基础上对平台的运动稳定性进行深入分析,该平台在给定的初始条件下可快速趋于稳定,所得结论为该类气浮定位平台的设计提供了一定的理论基础。To develop a high speed and high performance precision positioning table for wire bonding machine, a 2D precision positioning table with air bearings was presented. An air decoupling mechanism was designed to place the voice coil actuators on the base and effectively reduce the motion inertia. The detailed principle was given. The rules of influence of the orifice dimension and the bearing clearance on the carrying capacity and static stiffness of the table were discussed. At the same time the optimized parameters of air bearing were given. On the basis of it, the kinematic stability of the table was analyzed in detail, and the table could be stable rapidly on the given starting conditions. All the achievements would provide theoretic reference to the design of this kind of positioning table with air bearings.

关 键 词：定位平台 气浮解耦机构 气浮导轨 运动稳定性 

分 类 号：TB126[理学—工程力学]