薄膜内应力与温度特性的研究  

Study of Internal Stress of the Film and its Temperature Properties

作　　者：罗庆芳[1] 郭述文 唐琳 王兼善[1] 肖韶荣[1] 

机构地区：[1]南昌大学物理系,南昌330047

出　　处：《微电子学与计算机》1997年第4期5-7,共3页Microelectronics & Computer

基　　金：传感器国家重点开放实验室;省自然科学基金;省科委;省教委的资助

摘　　要：本文论述了薄膜应力快速测量系统中测温系统的设计原理及数据的处理方法，倒置了簿膜内应力与温度变化的关系曲线，从而计算出簿膜的热膨胀系数和复合弹性模量。The design principle of the tmperature-measuring system and the data-processing method in a rapid-measuring system of the internal stress for film are introduced.The dependent curve of the internal stress of film on temperature is measured, and thus calculated the thermal expansion coefficient of the film and compound young's modulus.

关 键 词：薄膜 内应力 温度特性 力学性能 

分 类 号：O484.2[理学—固体物理]