气敏元件室温光激发气敏性能研究  

Study on gas sensing properties of gas sensor enhanced by light at room temperature

作　　者：桂阳海[1] 张勇[1] 王焕新[1] 徐甲强[1] 李超[1] 

机构地区：[1]郑州轻工业学院河南省表界面科学重点实验室,河南郑州450002

出　　处：《电子元件与材料》2008年第2期13-15,22,共4页Electronic Components And Materials

基　　金：国家自然科学基金资助项目(No.50271029)

摘　　要：研究了WO3掺杂的ZnO基气敏元件在紫外(UV)光激发下,对乙醇气体的室温气敏性能。结果表明:在UV光照射下,各元件在室温下对体积分数为100×10–6的乙醇气体显示了很好的光敏、气敏性能,响应、恢复时间均在8s以内,其中以掺杂X(WO3)为1%的元件W(1)为最佳,从而实现了室温下的气敏测试。UV light enhanced ethanol sensing properties of WO3-doped ZnO sensors at room temperature were investigated. The results show that all the sensors have excellent opto-and-gas sensitive property to 100×10^-6 of ethanol vapor under the UV light activation simultaneously at room temperature. There are rapid response and recovery time within 8 s for all the sensors and the sensor W（1） with doping 1% WO3 （population fraction） show the best gas sensing property. Using this method, the gas sensing test at room temperature can he achieved.

关 键 词：无机非金属材料 氧化锌 氧化钨 气敏元件 室温 UV光 

分 类 号：P212.2[天文地球—测绘科学与技术] TQ174.75[化学工程—陶瓷工业]