紫外激光烧蚀Cu产生等离子体辐射特性  

Radiation Properties of Plasma Produced by Ultraviolet Laser Ablation of Metal Cu

作　　者：黄庆举[1] 

机构地区：[1]茂名学院物理系,广东茂名525000

出　　处：《光谱学与光谱分析》2008年第2期278-281,共4页Spectroscopy and Spectral Analysis

基　　金：国家自然科学基金项目(29273130);广东省社会发展科技计划项目(73065);茂名学院科学研究基金项目(203396)资助

摘　　要：通过时间分辨的光谱测量技术,测定了308nmXeCl紫外激光烧蚀金属Cu在氮气环境中诱导产生等离子体的发射光谱及其强度随时间分布,实验结果表明等离子体辐射光谱线主要由原子光谱线、一价离子光谱线及连续辐射背景光组成,各种光谱线的数目、辐射强度、持续时间不同。结合实验结果对等离子辐射机理进行了探讨,认为电子通过逆韧致辐射获得较高的能量,连续辐射主要来自高能电子的韧致辐射,原子和一价离子的激发主要是通过电子与原子、离子的碰撞传能以及电子与离子的复合产生,并用其定性地解释了所观察的实验现象。Time-resolved measurement of plasma plume emission spectra from XeCl excimer laser ablation of copper in nitrogen is reported. The experimental results indicate that the plasma emission spectra are mainly composed of atomic spectrum, univalent ion spectrum and continuous radiation, and these spectral lines have different number, intensity and duration. The main detailed mechanism of species excitation was discussed. The electrons obtain high-kinetic energy through reverse bremsstrahlung, the continuous radiation comes from the bremsstrahlung emission of energetic electrons ejected from the target, the excitation mechanism of atomic and univalent ion is inelastic collision between the elemental species and high kinetic-energy electron, and recombination of electron and ion in the plasma, and the model can be used to explain the experimental results qualitatively.

关 键 词：激光烧蚀 时间分辨光谱 等离子体辐射 金属Cu 

分 类 号：TN249[电子电信—物理电子学] O536[理学—等离子体物理]