多脉冲激光对超薄水冷金属镜引起的热畸变特性研究  

Investigation on Thermal Distortions of Super-thin Water-coold Metal Mirror Subjected to Irradiation of Multi-pulse Laser

作　　者：彭玉峰[1] 赫君[1] 梁珍珍[1] 程祖海[2] 

机构地区：[1]河南师范大学物理与信息工程学院,河南新乡453007 [2]华中科技大学光电子科学与工程研究院,湖北武汉430074

出　　处：《应用激光》2008年第1期37-41,共5页Applied Laser

摘　　要：利用ANSYS有限元分析软件数值模拟了多脉冲激光作用下水冷铜基Ni/Au反射镜的热畸变特性。得出了在不同能量的多脉冲激光照射下的温升、热应力及热变形分布,并在此基础上分析了温升和热变形随横向距离的变化规律以及应力与沟槽布局的关系。计算结果表明:循环的冷却水有效地降低了镜体温度,减少了镜面的热畸变;沟槽的布局对应力有一定的影响,沿沟槽方向存在较大的Von Mises应力。Laser induced thermal distortion characteristics of water cooled Cu substrate mirror with Ni/Au coatings are numerically simulated by making use of finite element analytical soft ANSYS. Temperature rise, thermal stress and thermal deformation distributions are obtained under irradiation of multi-pulse laser with various energies. The variational rules of temperature and thermal deformation along cross direction distance, the relation between stress and groove are also analyzed. The results show that cycling cool water can effectively reduce temperature of mirror bulk and decrease thermal distortion of mirror surface; Distribution of groove has some effect on stress, and bigger Von Mises stress lies along groove direction.

关 键 词：水冷金属镜 多脉冲激光 热畸变 有限元 

分 类 号：O532.25[理学—等离子体物理]