微细电火花加工系统及其工艺技术  

Research on a Micro-EDM System and Its Techniques

作　　者：张勇[1] 赵航[1] 张广玉[1] 王振龙[1] 赵万生[2] 

机构地区：[1]哈尔滨工业大学,哈尔滨150001 [2]上海交通大学,上海200030

出　　处：《中国机械工程》2008年第5期526-530,共5页China Mechanical Engineering

基　　金：中国博士后科学基金资助项目(AUGA41001056)

摘　　要：开发了一套微细电火花加工系统,该系统不仅能加工微细轴、微细孔,还能实现微三维结构的微细电火花加工。研究了针对该系统的微细电火花加工工艺技术,研究了放电电压、放电电容等工艺参数,主轴转速,以及工作液介质对微细电火花加工效率、相对电极损耗率的影响规律。采用旋转削边电极技术大大提高了进行大深径比微细孔加工时的加工效率。进行了大量的加工实验,加工出了最小直径为6μm的微细轴以及最小直径为10μm的微细孔;通过对电极损耗的在线补偿策略研究,实现了微三维结构的加工,加工出了外径为4mm、具有24个叶片的微型涡轮盘及具有微三维结构的微细梁,充分证实了该系统的广泛适用性。A micro EDM system which can machine micro electrodes, micro holes and micro 3D structures was developed. On this micro EDM system, the processing parameters such as machining open voltage, machining capacitances, rotating speed of spindle or dielectrics that effected on machining efficiency as well as the relative electrode wear rate were presented. And the processing rules of micro EDM are obtained. The technology that applied rotation chamfered edge electrode to increase the machining efficiency of micro holes of high aspect ratio was also researched. Lots of machining experiments were done, and the micro electrode with minimum diameter 6μm and the micro hole with minimum diameter 10μm are machined. Complex micro 3D structures can be machined easily on this equipment by using a method of electrode wear compensation on-line. At last, micro 3D structures, a micro turbo wheel with 24 blades, 4ram in dimension of outer diameter and a micro 3D beam which is very popular in MEMS,are machined on this machine, which proves the wide applications of the micro EDM system.

关 键 词：微细电火花加工 微细轴 微细孔 微三维结构 

分 类 号：TG661[金属学及工艺—金属切削加工及机床]