纳米结构Pt/WO_3薄膜的制备、表征及氢敏性能  

Preparation and characterization of Pt/WO_3 nano-film and its Hydrogen-sensing Properties

作　　者：侯长军[1] 范小花[2] 唐一科[3] 霍丹群[4] 

机构地区：[1]重庆大学化学化工学院/光电技术及系统教育部重点实验室,重庆400030 [2]重庆科技学院安全工程学院,重庆400042 [3]重庆大学机械传动国家重点实验室,重庆400030 [4]重庆大学生物工程学院,重庆400030

出　　处：《功能材料与器件学报》2008年第1期218-222,共5页Journal of Functional Materials and Devices

基　　金：国家自然科学基金资助项目(No.10376045);国家863项目(2006AA04z349);重庆市自然科学基金资助项目(No.8418)

摘　　要：以钨粉和双氧水为主要原料,采用溶胶-凝胶法制备了WO3纳米薄膜,并用磁控溅射法在该WO3薄膜表面溅射掺杂了催化剂Pt。研究了该Pt/WO3纳米薄膜的结构和氢敏性能,结果表明,用此种方法制备的WO3基掺Pt薄膜具有良好的氢敏特性;平均膜厚160nm;薄膜经400℃以下退火处理后是非晶态结构,表面疏松多孔,氢敏效果好;经400℃以上退火处理后呈晶态结构,表面粗糙致密,氢敏效果差;Pt掺杂量对薄膜的氢敏效果有影响,掺杂量越多,氢敏效果越差。WO3 nano - film was prepared by the Sol - Gel method using tungste and H2O2 as main materials, and sputtering a litter Pt on the WO3 nano -film by DC reactive magnetron sputtering method in the paper. The constructure and the properties of the Pt/WO3 nano - film were investigated. The results show that the Pt/WO3 nano -films prepared by this method have good hydrogen -sensing properties; Its average thickness is 160nm; The film which annealed below 400℃ is amorphous and has good hydrogensensing properties; The film which annealed above 400℃ is crystalline and has less hydrogen - sensing properties; The amount of Pt is main factor influence the film＇s hydrogen -sensing properties, the more the better.

关 键 词：Pt/WO3纳米薄膜 氢敏性能 溶胶-凝胶法 掺杂 

分 类 号：O647.2[理学—物理化学] TQ426.6[理学—化学]