微细电火花加工装置及其控制技术  

The Control Technology for Micro-EDM Machine and Its Applications

作　　者：张勇[1] 张广玉[1] 王振龙[1] 李志勇[1] 赵万生[2] 

机构地区：[1]哈尔滨工业大学机电工程学院,哈尔滨150001 [2]上海交通大学机械与动力工程学院,上海200240

出　　处：《上海交通大学学报》2008年第1期78-82,86,共6页Journal of Shanghai Jiaotong University

基　　金：博士后科学基金资助项目(AUGA41001056,AUGA41001143)

摘　　要：设计开发出了具有四轴三联动的微细电火花加工装置.针对该装置,对微细电极的制作控制技术、成型加工的伺服控制和微三维结构加工过程中电极损耗的补偿控制等进行了深入研究.在充分分析伺服机构性能的基础上,提出针对不同加工目的采用不同的伺服控制策略,不仅解决了伺服机构在微位移进给过程中存在的爬行问题,同时也较好地解决了电极制作过程中存在的伺服振荡问题;对电极损耗的补偿控制技术进行了深入的研究,进而提出了电极损耗的在线补偿策略,该补偿策略作为微细电火花加工控制系统的一个组成部分,使电极损耗的补偿与微细铣削加工的CAD/CAM系统分开,大大提高了微细电火花进行三维微结构加工的实用性.实验加工出最小直径为6μm的微细轴以及最小直径为10μm微细孔,并实现了外径为4 mm、具有24个叶片的微型涡轮盘以及直径为150μm微小半球的加工.A micro-EDM（MEDM） equipment with four axes, three of which perform linkage movement, was developed. The micro electrode fabricating control technology and forming MEDM servo control technology as well as electrode wear compensation control technology were researched. After analyzing the servo mechanism performance, the method of using different control strategy for different machining aim is adopted. This method solves not only crawl problem of servo mechanism, but also the servo oscillation problem while fabricating micro electrode. Furthermore, a method of electrode wear compensation on-line was presented, in which the electrode wear compensation strategy is one part of micro-EDM machine control system. Therefore, the precise model of electrode wear as well as the special CAD/CAM system is hardly necessary, which greatly enhances the applicability of 3D microstructures machined by micro-EDM. At last, the micro electrode with minimum diameter Ф6 μm and the micro hole with minimum diameter Ф10 μm were machined on this machine, and a micro turbo with 24 blades, 4 mm of outer diameter, and a micro hemisphere with diameter Ф150 μm were also machined by using above method

关 键 词：微细电火花加工 伺服控制策略 电极损耗补偿 微结构 

分 类 号：TG661[金属学及工艺—金属切削加工及机床]