失效空心阴极发射体的扫描电镜研究  

Research on the Failure Emitter of Hollow Cathode by FESEM

作　　者：史锴[1] 王志[1] 孙景春[1] 刘梦林[1] 韩征和[1] 

机构地区：[1]清华大学物理系,北京100084

出　　处：《现代科学仪器》2008年第1期51-52,共2页Modern Scientific Instruments

摘　　要：利用场发射扫描电镜(FESEM)及其附带能谱仪研究了失效空心阴极发射体的表面形貌、元素组成。研究了离子源环境参数包括预热温度、环境气体组成等对空心阴极失效的影响。提出在离子束辅助沉积(Ion Beam As- sisted Deposition)系统中影响空心阴极发射体寿命的影响因素包括预热温度,环境气体等。通过控制温度和环境气体参与反应的时间可以提高空心阴极的寿命。Surface morphology and composition analysis of the failure emitter of hollow cathode were characterized by using FESEM and EDS. The influence of environment parameters such as preheating temperatures, composition of circumstance gas on the failure of the emitter of the hollow cathode was investigated. In the Ion Beam Assisted Deposition system, the life of the hollow cathode was influenced by preheating temperature, circumstance gas and so on. The life of the emitter of the hollow cathode can be advanced by control of the temperature and the decrease of the time the oxygen participated in the reaction process.

关 键 词：空心阴极 发射体 场发射扫描电镜 

分 类 号：O462[理学—电子物理学]