波片对偏振激光干涉仪非线性误差的影响  

Effects of Wave Plate on Nonlinear Errors in Polarization Laser Interferometer

作　　者：杨军[1] 刘志海[1] 苑立波[1] 

机构地区：[1]哈尔滨工程大学理学院光子科学与技术研究中心,哈尔滨150001

出　　处：《光子学报》2008年第2期364-369,共6页Acta Photonica Sinica

基　　金：国家自然基金(60577005);教育部″高等学校优秀青年教师教学科研奖励计划″;哈尔滨工程大学基础研究基金(HEUF04111)资助

摘　　要：利用琼斯矩阵理论,研究了基于偏振移相技术的激光干涉仪中1/4波片和1/2波片的非理想因素导致非线性误差的产生机理和变化规律.理论研究表明:在导致波片处于非理想状态的各个因素中,干涉仪中两个1/4波片的差模延迟角误差Δεq所产生的恒定偏置误差和接收装置中1/4波片的延迟角误差εq3所引起的一次谐波非线性误差,是组成干涉仪非线性误差的最主要的两个部分;波片各种误差源非理想因素导致的非线性误差在小误差情况下经线性叠加后由干涉仪最终输出.The mechanism of nonlinear errors＇ appearance and the varying rule of nonlinear errors in laser interferometer based on polarized phase-shift technology, which is caused by nonideal factors of 1/4 wave plate and 1/2 wave plate, were studied by use of Jones matrix theory. It provided error compensation for laser interferometer in nanometer level measurement with theoretical foundation. Theoretical studies indicate that among the factors which make the state of wave plate to be nonideal, the invariable offset error caused by difference delay angle error △εq of two 1/4 wave plates in interferometer, and the nonlinear error of the first order harmonic wave caused by delay angle error εq3 of 1/4 wave plate in receiver, are the two most primary components of interferometer＇s nonlinear errors. Nonlinear errors caused by nonideal factors and various errors＇ source of wave plate are finally to be an output of interferometer by adding up linearly.

关 键 词：偏振干涉仪 波片 琼斯矩阵 非线性误差 

分 类 号：TH741[机械工程—光学工程]