电弧离子镀TiAlCrN多元涂层的性能研究  

Properties of TiAlCrN coating prepared by arc ion plating

作　　者：汝强[1] 胡社军[1] 黄拿灿[2] 胡显奇 

机构地区：[1]华南师范大学物理与电信工程学院,广东广州510006 [2]广东工业大学材料与能源学院,广东广州510006 [3]深圳市黄金屋真空科技有限公司,广东深圳518053

出　　处：《金属热处理》2008年第3期51-54,共4页Heat Treatment of Metals

基　　金：国家自然科学基金(50771046);广州市科技计划项目(2003Z2-D2071,2001-Z-119-01);广东省自然科学基金(05200534)

摘　　要：利用电弧离子镀技术采用Ti0.5Al0.5合金靶和纯Cr靶在钛合金TC11基片上制备了TiAlCrN多元涂层。用扫描电镜、X射线衍射仪、高分辨率透射电镜(HRTEM)分析了涂层表面、断面形貌、物相结构及微观结构。测试了涂层的显微硬度,研究了钛合金镀膜样品的耐磨性。试验结果表明,TiAlN涂层添加Cr元素后表现出较强的(220)择优取向,形成(Ti,Al)N和(Ti,Cr)N混合物相结构。透射电镜分析表明,该涂层晶粒细小,取向比较复杂,结构呈混晶排列。TiAlCrN涂层在大气环境中700℃氧化100 h后,涂层保持完整,主要以氮化物的形态存在,对TC11钛合金基体有良好的保护作用。室温干磨损试验表明,TiAlCrN涂层在强度较弱的区域出现片状剥落,且EDS分析表明,磨损过程存在部分氧化磨损的特征。Multi-component TiAlCrN coatings were prepared on the surface of TCll titanium alloy substrate by arc ion plating technique with Ti0.5-Al0.5 alloy and pure chromium targets. The surface and cross-section morphologies, phases, microstructure of the TiAlCrN coatings were analyzed by means of SEM, XRD and high-resolution transmission electron microscope （HRTEM）. The microhardness of coatings,wear resistance of the coated titanium alloy substrate were also investigated. The results show that adding Cr element to TiAlN coatings leads to forming the （220）preferred orientation. The phases are composed of（Ti,Al）N and（Ti,Cr）N nitrides. The HRTEM results show that there is a mixed grain structure in coating with fine grain and different orientation. After 100 h oxidation at 700 ℃ , TiAlCrN coatings mainly consist of nitride phases with perfect appearance, and have excellent protection for TC11 titanium alloy. There were stripped coatings in the low strength zone under unlubricated wear condition at room temperature, and oxidative wear were partly observed based on EDS （ Energy dispersive spectroscopy） analysis.

关 键 词：多元TiAlCrN涂层 电弧离子镀 摩擦磨损 抗氧化 TC11钛合金 

分 类 号：TG174.444[金属学及工艺—金属表面处理]