新型惯性压电驱动机构的设计与初步实现  

Design and Primary Realization of Newly Inertial Piezoelectric Actuator

作　　者：温建明[1] 程光明[1] 曾平[1] 张宏壮[1] 杨志刚[1] 

机构地区：[1]吉林大学机械科学与工程学院,长春130025

出　　处：《纳米技术与精密工程》2008年第2期155-158,共4页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(50475010);高等学校博士学科点专项科研基金资助项目(20050183020)

摘　　要：提出通过机械方式控制压电驱动机构和支撑面之间摩擦力的有序变化,形成有规律的新型惯性压电驱动机构.分析了机构的运动机理,建立了动力学模型,利用Matlab对机构进行了运动学仿真,设计并制作了驱动机构样机,对驱动机构动态特性进行了仿真分析和试验对比研究.两者结果吻合较好,表明采用简单的对称波形信号能驱动机构运动,直线驱动器最高速度可达1 mm/s,最高步长分辨率为20 nm,最大承载能力为1 000 g.By controlling the orderly change of the friction force between PZT moving mechanism and supporting face in mechanical way, a novel kind of inertial piezoelectric actuator was proposed. Based on working principle of the actuator, the dynamic formulation of inertial actuator was established, and then the kinetic simulation of the actuator was carried out by using Matlab software. Moreover, the sample of newly inertial actuator was designed and manufactured. The simulation results of dynamic characteristics of this actuator agreed well with the experimental ones, which indicates that the simple associated symmetry electrical signal can provide stable stepping movement with the maximal speed of 1 mm/s, high resolution of 20 nm and maximum loading capacity of 1 000 g.

关 键 词：压电 惯性 动力学方程 摩擦 仿真 

分 类 号：TP211[自动化与计算机技术—检测技术与自动化装置]