Al和MgF_2多层滤光膜光谱及其环境稳定性  

Al and MgF_2 multi-layer filters and their environmental stability

作　　者：郑秀萍[1] 吴永刚[1] 付联效[1] 王振华[1] 曹鸿[1] 张莉[1] 焦宏飞[1] 彭东功[1] 

机构地区：[1]同济大学精密光学工程技术研究所,上海200092

出　　处：《强激光与粒子束》2008年第2期219-223,共5页High Power Laser and Particle Beams

基　　金：国家自然科学基金委员会和中国工程物理研究院联合基金资助课题(10576021)

摘　　要：采用真空热蒸发和电子束蒸发方法,制备了Al和MgF2多层滤光膜,并在100,150,200,300℃的真空环境中进行了热处理,考察了真空热处理温度对多层滤光膜光谱、形貌和环境稳定特性的影响。结果表明,经过真空热处理后,滤光膜表面粗糙度降低,峰值透射率升高,半宽度增大。随着在实验室干燥环境中放置时间的增加,未热处理以及300℃热处理样品的透射率峰位向长波方向有较大的移动,峰值透射率降低,可见光抑制特性减弱。而150,200℃热处理样品的透射率峰位移动很小,峰值透射率及可见光抑制特性基本保持不变,具有很好的环境稳定性。Al and MgF2 metal-dielectric multi-layer filters have been fabricated by thermal and electron beam evaporation. Influences of vacuum annealing at 100 ℃, 150 ℃, 200 ℃ and 300 ℃ respectively for 40 min on spectrum, morphology and environmental stability have been analyzed. For all samples, results show that after annealing, rms roughness reduces, maximal transmittance and half width increase. During the storage of the samples in desiccated chamber, the locations of the maximal transmittances have shifted much toward long wavelength, the maximal transmittances reduce and the restrain abilities of visible spectrum weaken for the as-deposited and 300℃annealed samples. While the locations of the maximal transmittances have little shift, the maximal transmittance and the restrain ability of visible spectrum keep unchanged for the 150 ℃ and 200 ℃ annealed samples, showing excellent environmental stability.

关 键 词：多层膜 热处理 环境稳定性 峰值透射率 

分 类 号：O484[理学—固体物理]