ICP中放电模式转化过程中悬浮电位变化的多样性  

The diversity of floating voltage in the process of mode transition in ICP

作　　者：祖新慧[1] 孙景超[1] 张俊[1] 李俊龙[1] 

机构地区：[1]沈阳航空工业学院,辽宁沈阳110034

出　　处：《沈阳航空工业学院学报》2008年第1期74-79,共6页Journal of Shenyang Institute of Aeronautical Engineering

摘　　要：研究了射频感性耦和等离子体(ICP)中悬浮电位在模式转化过程(E-H模式)的变化多样性。实验研究了射频功率在5W-1000W,气压在2Pa-50Pa的范围内,通过改变导电地面积、匹配网络、气压等参数,使用Z-Scan系统、电流电压探头以及静电探针进行测量的等离子体悬浮电位在模式转化过程中随功率变化的多种形式,同时给出了r型射频匹配网络的正负反馈区的区别,并对产生的多种现象进行了的理论解释。The changing＇s diversity of floating voltage as absorbed power in the process of E-H mode transition in inductively coupled plasma is studied. At 5W-1000W of radio-frequency power and 2Pa-50Pa of pressure, Using advanced Z-Scan measuring system, current probe and voltage probe, measuring many parameters including plasma absorbed power, antenna current, antenna voltage, and plasma floating voltage, the effects on the properties of transition between plasma discharge E-mode and H-mode transition by changing impedance matching network, coupled density of antenna, area of installation conductor ground and pressure are studied. The concepts of positive and negative feedback regions are established basing on the influencing of stray capacitor in impedance matching work to the output power of radio-frequency power supply. The part phenomena are analyzed intheory.

关 键 词：射频感性耦合等离子体 模式转化 反馈区 

分 类 号：O531[理学—等离子体物理]