光调制器综述  

Review on Electro-Optic Modulator

作　　者：陈燕[1] 张世林[1] 张彬[1] 毛陆虹[1] 郭维廉[1] 

机构地区：[1]天津大学电子信息工程学院,天津300072

出　　处：《半导体技术》2008年第4期286-288,315,共4页Semiconductor Technology

基　　金：国家自然科学基金重点项目(60536030;60676038);天津市应用基础研究计划重点项目(06YFJZJC00200)

摘　　要：在光纤通信中,光调制器光信号调制发挥着不可替代的作用。介绍了光调制器的发展历程和最新进展,详细分析了不同种类的Si基光调制器的工作原理。与化合物材料光调制器进行了对比,指出最新技术利用Si作为基本材料,研究起步较晚,但是进展较快,但目前其相应速度等特性还比不上化合物调制器。表明由于Si基光调制器易与CMOS和VLSI工艺兼容,实现光电集成的全Si化和单片化是目前的一个研究热点。Optical signal modulation of electro-optic modulator plays an irreplaceable role in optical fiber communications. The development and the newest progress of electro-optic modulator are introduced, the working principles of different types of Si-based electro-optic modulators are introduced. Compared with the modulators of compound material, it is pointed that Si is used as the basic material in the newest technology, late but with great progress, though the responding speed is not as perfect as the compound modulator. It indicates that Si-based optical modulator is compatible with CMOS and VLSI, realizing the full Si optoelectronic integrated monolithic is a hotspot currently.

关 键 词：光调制器 环形谐振器 空穴等离子体 

分 类 号：TN252[电子电信—物理电子学] TN256