在大气气氛下应用激光和等离子体混合方法制备氮化钛  

Laser and Plasma Nitriding of Titanium Using Continuous Wave-CO2 Laser in Atmosphere Environment

作　　者：孙凤久[1] 于撼江[1] 张军[1] 

机构地区：[1]东北大学理学院,辽宁沈阳110004

出　　处：《中国激光》2008年第1期125-130,共6页Chinese Journal of Lasers

基　　金：国家自然科学基金(50174020)资助项目

摘　　要：在大气气氛下，采用连续CO2激光和氮等离子体混合法（LPN）对工业纯钛样品表面进行处理，获得了氮化钛膜层。用扫描电镜（SEM），X射线衍射（XRD）对样品的形貌和结构进行了表征，结果表明在合适的条件下可以获得满意的氮化效果。在激光功率密度2．0×10^3～1．0×10^6W／cm^2，扫描速度200～1000mm／min的区间内，激光功率密度越高，扫描速度越低，氮化效果越好。工业纯钛样品的氮化深度最佳可达80μm。在有效氮化区域内，氮含量随深度变化迅速，而在过渡区域内，氮含量变化缓慢。In the atmosphere environment, laser combined with plasma stream technique was used to process industrially pure titanium surface, and film of titanium nitride was formed on the titanium surface. Microstructure and phase formation of the nitrided sample surface were analyzed using scanning electron microscopy （SEM） （with energy dispersive spectrometer （EDS）） and X-ray diffraction （XRD） techniques. It was found that under proper conditions, the satisfactory nitriding results were obtained. In the range of laser power density between 2.0× 10^5 and 1.0×10^6 W/cm^2, scanning velocity between 200 and 1000 mm/min, the nitride effect was best when laser power is 1.0×10^6 W/cm^2 and scanning velocity is 200 mm/min. The best nitride depth of the industrially pure titanium sample was 80 μm. In the effective nitriding area, with the increasing of the depth, the nitrogen content decreased quickly, while the nitrogen content decreased slowly in the transition area.

关 键 词：激光技术 激光和等离子体混合法 氮化钛 形貌与结构的表征 

分 类 号：TG156.99[金属学及工艺—热处理]