固着磨料加工工艺对磷酸盐钕玻璃亚表面缺陷的影响  

Effect of Bound Diamond Abrasives Fabrication Technology on Subsurface Damage in Nd-Doped Phosphate Glass

作　　者：张伟[1] 朱健强[1] 

机构地区：[1]中国科学院上海光学精密机械研究所高功率激光物理联合实验室

出　　处：《中国激光》2008年第2期268-272,共5页Chinese Journal of Lasers

摘　　要：散粒磨料研磨与固着磨料研磨是光学研磨加工过程中的两种主要手段,但两者材料去除的机制不同。目前针对高功率固体激光装置中的主要工作物质——磷酸盐激光钕玻璃的亚表面缺陷(SSD)研究相对较少,因此在实验的基础上,通过系统地研究固着磨料对磷酸盐激光钕玻璃的研磨工艺过程,分析了多种因素,如磨料粒径、载荷大小、机床转速,以及结合剂材料与冷却液等对钕玻璃亚表面缺陷形成的影响,并与散粒磨料研磨工艺所产生的亚表面缺陷进行了比较,对关键工艺参数进行定量,为高质量钕玻璃制造工艺的选型以及进一步优化亚表面缺陷提供了重要的参考数据。Loose abrasive grinding and bound abrasive grinding are two principal grinding methods in optical cold process, but they are different in grinding removal mechanism. Nd doped phosphate glasses are dominating materials in high average power laser solid state lasers. For little investigative experience in subsurface damage （SSD） in Nd doped phosphate glasses, this paper investigated the grinding removal mechanism using different bound diamond abrasives. The effects of abrasive size, load, spindle speed, bonding material and the coolant on the subsurface damage in Nd-doped phosphate glasses were surveyed as well. Subsurface damage produced by loose abrasives was presented for comparation. All the results provide essential foundation for choosing and optimizing fabrication technology of high-quality Nd-doped phosphate glasses.

关 键 词：材料 光学加工 亚表面损伤 榆测 激光玻璃 激光损伤阈值 

分 类 号：TN244[电子电信—物理电子学] TG73[金属学及工艺—刀具与模具]