电场作用下的变焦非球面液滴微透镜  

Aspherical Liquid Micro-Lens Manipulated by Electrostatic Forces

作　　者：詹珍贤[1] 何建慧[1] 姚海涛[1] 王克逸[1] 

机构地区：[1]中国科学技术大学精密机械与精密仪器系,安徽合肥230027

出　　处：《光学学报》2008年第2期361-364,共4页Acta Optica Sinica

基　　金：国家863计划(2006AA04Z333)资助课题

摘　　要：提出了一种制作变焦非球面液滴微透镜并在线检测其光学性能的新方法。在实时进行光学检测的条件下,选择光固化材料,利用电场作用操控液滴透镜的面形实现变焦,在检测到较好的透镜面形和聚焦状态时,采用紫外光固化技术使液滴透镜固化,可制作具有良好光学成像和聚焦性能的非球面微透镜。研制了紫外光固化非球面液滴微透镜制作平台及在线检测系统,实验观察并讨论了液滴透镜面形和聚焦光斑随电场作用的变化规律,成功实现了液滴透镜的变焦,并获得了良好的非球面面形和聚焦光斑,证明了用此方法制作高成像性能的非球面微透镜的可行性。A novel method of fabricating zoom aspherical liquid micro-lens from ultra-violet （UV） curable polymer with on-line measurement is proposed. Electrostatic forces are employed to manipulate the shape of liquid polymer lens. Surface profile distortions of the liquid lens result in its focus variability. UV light is employed to cure the liquid lens when its surface profile and focal spot are appropriate. Therefore, aspherical micro-lens with nice optical imaging and focusing abilities can be fabricated. An experimental system which can fabricate zoom aspherical liquid micro-lenses and on-line measure their surface profiles and focal spots is developed. Experimental results show the variations of the surface profiles and focal spots of liquid lens changing with the electrostatic forces, and realize its zoom focus successfully. Fine aspherical surface profiles and focal spots of the liquid lens demonstrate the feasibility of fabricating aspherical micro-lens by using this method.

关 键 词：微光学 非球面透镜 电场作用 液滴透镜 变焦透镜 

分 类 号：TN256[电子电信—物理电子学] TN942.21