基于ASIC芯片的微小电容测量电路研究  

Ultra-small Capacitance Sensing Circuit Based on a Piece of ASIC

作　　者：胡敏[1] 李晓莹[1] 常洪龙[1] 蒋庆华[1] 

机构地区：[1]西北工业大学微/纳米系统实验室,陕西西安710072

出　　处：《计量学报》2007年第4期379-382,共4页Acta Metrologica Sinica

基　　金：国家自然科学基金(50505038);西北工业大学科技创新基金(M450202)

摘　　要：基于一款专用集成电路芯片(ASIC)HT133实现了一种微小电容测量电路。该电路具有高分辨率、高抗干扰性、偏置调节能力和模拟、数字信号两种输出模式等特点。文中详细论述了测量电路的实现以及电路的抗干扰措施,并通过测定一组微小电容验证了电路的性能。实验表明,电路分辨率达0.5 fF,非线性度8.67%。该电路在各种电容式传感器特别是微机电系统(MEMS)传感器中有广泛的应用前景。A circuit based on a piece of Applications Specific Integrated Circuit （ASIC） HT133 for sensing ultra-small capac- itance is presented. It has some prominent features such as high resolution, high anti-interference ability, offset adjustment ability and both analog and digital signal output modes. Implementation of every module and means of noise limitation are described detailedly. An experiment measurement of a series of small capacitances is performed. Results show that the circuit has very high performance with resolution of 0.5 femtofarad （0.5 × 10^-15 farad） and nonlinearity of 8.67 %. A basis for this ASIC to be applied in capacitive sensors especially micro-electro-mechanical system（MEMS） sensors is provided.

关 键 词：计量学 微小电容 电容式传感器 

分 类 号：TB971[一般工业技术—计量学]