变温腐蚀法制备纳米光纤探针  

Fabrication of Nanometric Optical Fiber Probe by Etching Method Through Changing Temperature

作　　者：杨修文[1] 祝生祥[2] 胡毅[1] 

机构地区：[1]郧阳师范高等专科学校物理系,湖北丹江口442700 [2]同济大学Pohl固体物理研究所,上海200092

出　　处：《微纳电子技术》2008年第4期231-234,共4页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(69877014);湖北省教学研究资助项目(2003298)

摘　　要：通过改变温度,用腐蚀的方法制备出用于近场光学显微镜的光纤探针。通过控制光纤在不同温度的腐蚀液中腐蚀的时间,制备出多种形貌的光纤探针,所制作探针的锥形过渡区短而锥角大。该法具有重复性高、探针形貌可控、操作方便、实验费用低廉、制备的探针表面光滑等优点,利用该方法成功地制备出针尖尺寸50～300nm、针尖锥角在40°～74°可调的光纤探针。将制备的探针用于扫描全息光栅(500线/mm),结果在40mm范围内扫描有20个周期,与全息光栅的标定结果相符。The nanometric optical fiber probes used in near-field optical microscopy, were fabricated by etching method through changing the temperature. Probes with various shapes were fabricated, the taper length and taper angle of the probe could be efficiently controlled through adjusting the etching time in the corrosive liquid with different temperature. This method has the advantages such as high reproducibility, controllability, convenience, lower cost, and it can make the probe surface smooth. Probes with 50-300 nm apex diameter and 40°-74° taper angle were achieved by this method. The probe was used to scan holographic grating （500 lines/mm） , scanning within 20 cycles in 40 mm. The result agrees with the calibration results of holographic grating.

关 键 词：纳米光纤探针 近场光学 显微镜 腐蚀法 温度 

分 类 号：O439[机械工程—光学工程] TH742[理学—光学]