热丝辅助双偏压氢等离子体制造金刚石锥状表面研究  

Formations of conic surfaces on diamond films induced by hot filament assisted double-bias hydrogen plasma

作　　者：孟亮[1] 张杰[1] 朱晓东[1] 温晓辉[1] 丁芳[1] 

机构地区：[1]中国科学技术大学近代物理系中国科学院基础等离子体物理重点实验室,合肥230026

出　　处：《物理学报》2008年第4期2334-2339,共6页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:50472010,10635010)资助的课题~~

摘　　要：利用热丝辅助双偏压氢等离子体对化学气相沉积金刚石薄膜进行了纳米尺度上的表面改装,制造出锥状金刚石列阵.金刚石薄膜内在的柱状结构使氢离子在刻蚀薄膜时产生非均匀的刻蚀速率,对锥状表面的形成起着重要作用.另一方面,溅射出的含碳粒子会发生二次沉积,最终的特征表面形貌取决于刻蚀与含碳基团再沉积之间的相互竞争.栅极的使用影响基底区域放电的伏安特性,改变栅极电流可以对形成的金刚石特征表面结构进行有效调节.在处理过程中少量掺入甲烷,提高了金刚石表面附近的含碳基团浓度,促进二次成核,进而诱发均匀分布的锥状列阵.The hot filament assisted double-bias hydrogen has been employed for the surface fabrication of the as-formed chemical vapor deposited diamond films on the nanometer scale. Diamond cone arrays are successfully prepared through hydrogen plasma etching. The intrinsic columnar structure of the diamond films leads to the unevenly distributed ion etching rate, which plays an important role in the cone formation. Simultaneously, the carbon-containing species sputtered out may re-deposit on the surface. The evolvement of the characteristic surface is thus determined by the competition between the ion etching and the carbon deposition. The application of grid electrode influences the discharge characteristics at the substrate region. By controlling the grid current, the surface structure of diamond films may be significantly tuned. Moreover, by introducing small amounts of methane in the etching process, the increased concentration of carbon-containing species enhances the secondary diamond nucleation on the film surface, which further promotes the uniformity of the diamond cone arrays.

关 键 词：等离子体 表面 金刚石薄膜 

分 类 号：O539[理学—等离子体物理]