高电阻率多层纳米颗粒膜软磁特性及微波磁导率  

Soft magnetic properties and microwave permeability of multilayer nanogranular films with high resistivity

作　　者：别少伟[1] 江建军[1] 马强[1] 杜刚[1] 袁林[1] 邸永江[1] 冯则坤[1] 何华辉[1] 

机构地区：[1]华中科技大学电子科学与技术系,武汉430074

出　　处：《物理学报》2008年第4期2514-2518,共5页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:50371029;50771047);教育部新世纪优秀人才支持计划(批准号:NCET20420702);湖北省杰出青年科学基金(批准号:2005ABB002)资助的课题~~

摘　　要：研究了应用于微波频段的多层纳米颗粒膜的电阻率、软磁特性和微波磁导率.采用多次顺序沉积Co40Fe40B20和SiO2薄层制备了薄膜.在100kA/m均匀面内磁场经过250℃真空退火2h,制备的Co40Fe40B20/SiO2多层膜具有难轴矫顽力为210A/m、饱和磁化强度为838.75kA/m、电阻率为2.06×103μΩcm,而且具有面内单轴各向异性场为2.78kA/m.该薄膜的微波磁导率实部为125并且保持到1.6GHz,其铁磁共振频率为1.73GHz;在1—2GHz范围,薄膜磁导率虚部具有较大值.The resistivity, soft magnetic properties and microwave permeability of multilayer nanogranular films suitable for high frequency applications have been investigated in this work. These films were prepared by repeated sequential depositions of thin layers of Co40Fe40 B20 and SiO2. After vacuum annealing at 250 ℃ under a uniform in-plane magnetic field of 100 kA/m for 2 h, the Co40 Fe40 B20/SiO2 multilayer films have the hard axis coercivity of 210 A/m, saturation magnetization of 838.75 kA/m, resistivity of 2.06 × 10^3 μΩem. Moreover, the results show that the films have an in-plane uniaxial anisotropy of 2.78 kA/m. As a consequence, the real part of measured permeability keeps constant at 125 up to 1.6 GHz. The resonance frequency was about 1.73 GHz.

关 键 词：纳米颗粒膜 电阻率 软磁特性 微波磁导率 

分 类 号：TB383.1[一般工业技术—材料科学与工程]