DYNAMIC CHARACTERISTIC ANALY-SIS OF PRECISE LONG STROKE LINEAR MOTOR WITH AIR-BEARING IN OPTICAL LITHOGRAPHY  

作　　者：CHEN Xuedong YU Xianzhong HE Xueming YAN Tianhong 

机构地区：[1]State Key Laboratory of Digital Manufacturing Equipment ＆ Technology, Huazhong University of Science and Technology, Wuhan 430074, China [2]National Optical Lithography Equipment R ＆ D Center, Shanghai 201203, China

出　　处：《Chinese Journal of Mechanical Engineering》2008年第2期17-22,共6页中国机械工程学报（英文版）

基　　金：National Basic Research Program of China (973 Program,No.2003CB716206);National Natural Science Foundation of China (No.50605025)

摘　　要：Dynamic characteristic is presented by identifying the model and the dynamic parameters of a precise long stroke linear motor （PLSLM） with the air-bearing in optical lithography. The PLSLM is supported by air-bearing on the stator, and is driven by on-board two large linear motors in a cross-configuration. Firstly, a model of the PLSLM is established by finite element method （FEM）. Secondly, based on the model, the natural frequencies and model shapes are discusse＆ And the contribution of each active mode is evaluated by computing the modal participation factors （MPF）, which indicates the major vibration direction. Furthermore, by the experimental modal analysis, the experimental results are in agreement with simulation results, which it is sure that the FEM is reasonable. What＇s more, comparing with the effects on the frequency due to the air-bearing stiffness, the relations of the natural frequencies with the air-bearing stiffness are found. It is found that the frequency response curve is fluctuant with the air-bearing stiffness in each direction. Finally, it is conclusion that the natural frequency of the PLSLM is largely affected by the air-bearing stiffness variety. This research is contributed to the dynamic characteristics resulted from the air-beating stiffness. Further work will include better optimization on the dynamic parameter in the controller design through the control algorithm for the precise long stroke motor.Dynamic characteristic is presented by identifying the model and the dynamic parameters of a precise long stroke linear motor （PLSLM） with the air-bearing in optical lithography. The PLSLM is supported by air-bearing on the stator, and is driven by on-board two large linear motors in a cross-configuration. Firstly, a model of the PLSLM is established by finite element method （FEM）. Secondly, based on the model, the natural frequencies and model shapes are discusse＆ And the contribution of each active mode is evaluated by computing the modal participation factors （MPF）, which indicates the major vibration direction. Furthermore, by the experimental modal analysis, the experimental results are in agreement with simulation results, which it is sure that the FEM is reasonable. What＇s more, comparing with the effects on the frequency due to the air-bearing stiffness, the relations of the natural frequencies with the air-bearing stiffness are found. It is found that the frequency response curve is fluctuant with the air-bearing stiffness in each direction. Finally, it is conclusion that the natural frequency of the PLSLM is largely affected by the air-bearing stiffness variety. This research is contributed to the dynamic characteristics resulted from the air-beating stiffness. Further work will include better optimization on the dynamic parameter in the controller design through the control algorithm for the precise long stroke motor.

关 键 词：Dynamic analysis Air-bearing stiffness Precise long stroke linear motor Frequency response 

分 类 号：TH74[机械工程—光学工程]